Descripción del proyecto
This proposal is to purchase a nanoimprint lithographic (NIL) system to develop a new nanofabrication capability within the institute and the UAM Campus of Excellence, NIL relies on direct mechanical deformation of a resist material, typically a polymer, to transfer with high fidelity the features contained on a mold, NIL is a replication technology that allows for cost effective large area nanostructuring with a resolution down to 5 nm, The equipment we propose has capabilities for thermal and UV processing which is of interest for nanostructuring directly a large range of materials from thermoplastics, thermo sets, UV curable polymers, sol-gel or metal organics, Used as lithography tool, NIL will allow structuring additional type of materials such as metallic, magnetic or superconducting films,Large area nanostructuring is one of the bottle necks for the implementation of nanotechnology, Hence, a NIL equipment will increase tremendously our competencies in nanofabrication and will facilitate our research on the development or discovery of new properties or functions in nano-scaled materials or the development of prototypes and devices in more downstream applications,