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NEMSIC

Financiado

Cerrado

Hybrid Nano Electro Mechanical Integrated Circuit Systems for Sensing and Powe...

Hybrid Nano Electro Mechanical Integrated Circuit Systems for Sensing and Power Management Applications NEMSIC addresses the future intelligent sensor and actuator systems in which solid-state semiconductor micro/nanodevices and micro/nano-mechanical devices are co-integrated for new functionalities and increased performance.The pro... ver más

31/03/2012

EPFL

5M€

Presupuesto del proyecto: 5M€

Líder del proyecto

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE No se ha especificado una descripción o un objeto social para esta compañía.

TRL 4-5

Fecha límite participación Sin fecha límite de participación.

Ver 9 Participantes

Financiación concedida El organismo FP7 notifico la concesión del proyecto el día 2012-03-31 No tenemos la información de la convocatoria

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Información adicional privada

No hay información privada compartida para este proyecto. Habla con el coordinador.

9 Participantes

EPFL

0.00€ | Lider

SOUTHAMPTON

N.D. | Participante

TU Delft

N.D. | Participante

CEA

N.D. | Participante

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Líder del proyecto

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE No se ha especificado una descripción o un objeto social para esta compañía.

TRL 4-5

Presupuesto del proyecto 5M€

Fecha límite de participación Sin fecha límite de participación.

Descripción del proyecto NEMSIC addresses the future intelligent sensor and actuator systems in which solid-state semiconductor micro/nanodevices and micro/nano-mechanical devices are co-integrated for new functionalities and increased performance.The project proposes the exploration and development of low power sensing micro/nanosystems based on Nano-Electro-Mechanical (NEM) structures integrated on a Silicon-On-Insulator (SOI) or Silicon-On-Nothing (SON) technological platform. The applications that drive the technological NEM-based smart system demonstrators are gas (COx, NOx, SOx) and biological sensing (DNA, proteins and other molecules), dedicated to critical environment monitoring and applications in the fields of genetics, pharmacology and drug discovery. NEM technology will be combined with silicon CMOS technology involving novelty and scientific/technical challenges at three levels: (i) system level, addressing the challenge of true nano-micro interfaces, where signals detected by arrays of nanostructures are processed by smartly designed low power CMOS circuitry, (ii) device level, where novel true hybrid NEM-FET devices support new highly sensitive detection scheme and power management via sleep switches and (iii) technology level, where nanotechnology processes (top down processed nanobeams and nanogaps, featuring sub-100nm dimensions) will be developed and combined with advanced functionalization techniques for dedicated sensing that stays compatible with CMOS in future IC-embedded or post-IC approaches. The reliability of the NEM structures, combined with prospects for 0-level packaging are studied as key challenges for the success of such Nano-electro-mechanical-system-integrated-circuits (NEMSIC).Finally, NEMSIC is expected to provide the end-users with flexible design methodologies based on advanced but well-controlled SOI or SON technology platforms, with predictable performances and associated cost effectiveness.

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