Innovating Works

14AMI

Financiado
14 Angstroms Module Integration
The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the... The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the-art holistic metrology techniques for both wafer and mask inspection and review. All is aimed to keep the pace in the industry to follow Moore’s law. The project addresses the following 3 main pillars that are relevant in enabling manufacture of 14A technology, 1) lithography, 2) metrology and 3) process module integration. In lithography the aim is to realize solutions for the 0.55NA EUV scanner platform to secure 14Angstrom node compliance in performance, that is, resolution, alignment, throughput and optics lifetime. In Metrology the objective is to cover wafer and mask metrology and quality control. The aim is to develop holistic metrology, tools & methods and data analytics to improve overlay, CD and focus measurement and quality control with a Precision to Tolerance, P/T, ratio between 0.1 and 0.3. In process module integration work covers the realization and demonstration of a CFET – Complementary Field Effect Transistor - CMOS device. Three options will be investigated for integration; a monolithic, sequential and a hybrid solution. In addition, the partners will develop a PFAS-free photo resist to reduce the ecological footprint of photolithography processes, and a smart AI based sensor technology to improve vacuum chambers' efficiency and reduce waste. At societal level the expected impact of the 14AMI project will support the partners and their supplier network to stay at the leading edge of high-tech developments, crucial to meet the digitization challenges of the European society. Moreover, 14AMI will boost industrial competitiveness, and attract talent in Europe, while enabling new application in areas such as security, communication and enabling of further automation in mobility, health and research. ver más
30/04/2026
ASML NETHERLANDS B...
109M€
Duración del proyecto: 35 meses Fecha Inicio: 2023-05-10
Fecha Fin: 2026-04-30

Línea de financiación: concedida

El organismo HORIZON EUROPE notifico la concesión del proyecto el día 2023-05-10
Línea de financiación objetivo El proyecto se financió a través de la siguiente ayuda:
HORIZON-KDT-JU-2022-1-IA-Topic-1: General according to ECS-SRIA 2022 (IA)
Cerrada hace 2 años
Presupuesto El presupuesto total del proyecto asciende a 109M€
Líder del proyecto
ASML NETHERLANDS B.V. No se ha especificado una descripción o un objeto social para esta compañía.