Hola,
¿eres nuevo aquí?

Registrate y conecta tu empresa con financiación pública, partners y proyectos.

14AMI

Financiado

14 Angstroms Module Integration

The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the... ver más

30/04/2026

ASML NETHERLANDS B...

109M€

Presupuesto del proyecto: 109M€

Líder del proyecto

ASML NETHERLANDS B.V. No se ha especificado una descripción o un objeto social para esta compañía.

Ver 32 Participantes

Financiación concedida El organismo HORIZON EUROPE notifico la concesión del proyecto el día 2023-05-10

Línea de financiación objetivo El proyecto se financió a través de la siguiente ayuda:

HORIZON-KDT-JU-2022-1-IA-Topic-1: General according to ECS-SRIA 2022 (IA)

I+D +1

Cerrada hace 2 años

0% 23% 100%

32 Participantes

ASML NETHERLANDS B.V.

3.92M€ | Lider

ICT Integrated Circuit Testi...

743.60K€ | Participante

Pfeiffer

430.53K€ | Participante

Proyectos interesantes

TEC2009-12686 MODELADO DE PIXELES EN TECNOLOGIAS CMOS SUB-100NM 60K€ Cerrado

TEC2008-06758-C02-01 CARACTERIZACION, SIMULACION Y MODELADO DE TRANSISTORES CMOS... 287K€ Cerrado

EIN2019-103473 CO-INTEGRACION CMOS DE DISPOSITIVOS BASADOS EN MATERIALES BI... 9K€ Cerrado

Next-2Digits The next generation of sensors and imagers enabled by 2D mat... 5M€ Cerrado

PID2020-117498RB-I00 MEJORA DE LA RESPUESTA DE FOTODETECTORES DE IR BASADOS EN SE... 105K€ Cerrado

Últimas noticias

30-11-2024: Cataluña Gestión For... Se ha cerrado la línea de ayuda pública: Gestión Forestal Sostenible para Inversiones Forestales Productivas para el organismo:

29-11-2024: IDAE En las últimas 48 horas el Organismo IDAE ha otorgado 4 concesiones

29-11-2024: ECE En las últimas 48 horas el Organismo ECE ha otorgado 2 concesiones

Duración del proyecto: 35 meses Fecha Inicio: 2023-05-10
Fecha Fin: 2026-04-30

Líder del proyecto

ASML NETHERLANDS B.V.

Presupuesto del proyecto 109M€

Descripción del proyecto The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the-art holistic metrology techniques for both wafer and mask inspection and review. All is aimed to keep the pace in the industry to follow Moore’s law. The project addresses the following 3 main pillars that are relevant in enabling manufacture of 14A technology, 1) lithography, 2) metrology and 3) process module integration. In lithography the aim is to realize solutions for the 0.55NA EUV scanner platform to secure 14Angstrom node compliance in performance, that is, resolution, alignment, throughput and optics lifetime. In Metrology the objective is to cover wafer and mask metrology and quality control. The aim is to develop holistic metrology, tools & methods and data analytics to improve overlay, CD and focus measurement and quality control with a Precision to Tolerance, P/T, ratio between 0.1 and 0.3. In process module integration work covers the realization and demonstration of a CFET – Complementary Field Effect Transistor - CMOS device. Three options will be investigated for integration; a monolithic, sequential and a hybrid solution. In addition, the partners will develop a PFAS-free photo resist to reduce the ecological footprint of photolithography processes, and a smart AI based sensor technology to improve vacuum chambers' efficiency and reduce waste. At societal level the expected impact of the 14AMI project will support the partners and their supplier network to stay at the leading edge of high-tech developments, crucial to meet the digitization challenges of the European society. Moreover, 14AMI will boost industrial competitiveness, and attract talent in Europe, while enabling new application in areas such as security, communication and enabling of further automation in mobility, health and research.

Conecta tu I+D

Entra hoy

Financiación

Empresas

CTIs/Universidades

Proyectos

Investigadores